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Micro and Nanofabrication (MEMS) · LearnSpace
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Micro and Nanofabrication (MEMS)

Курс от École Polytechnique Fédérale de Lausanne
Средний≈ 63.4 чАнглийский
О курсеНавыкиПрограммаПреподаватели

О курсе

Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment. Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more. Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment. For some selected examples, students will also be able to set process parameters on a virtual panel to see how it affects the processing results.

Навыки, которые вы освоите

Materials scienceChemical EngineeringProcess EngineeringSemiconductorsMicrometerElectronicsProcess DevelopmentProduction ProcessProcess ControlLaboratory EquipmentScientific MethodsProcess AnalysisManufacturing and ProductionEngineering, Scientific, and Technical InstrumentsChemistrySystems Of MeasurementVerification And ValidationLaboratory TestingManufacturing Processes

Программа курса

8 модулей · 174 учебных материалов

01Week 1: MEMS and cleanroom introduction27 материалов

Welcome

TeaserВидеоWelcomeЧтениеInitial surveyPLUGIN

Practical information

Course structureЧтение

Учитесь у экспертов

Juergen Brugger

Преподаватель курса

Micro and Nanofabrication (MEMS)
В каталоге вашей программы

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Обучение откроется на Coursera
в новой вкладке

Обучение на Coursera

≈ 63.4 ч

8 модулей

Язык: Английский

Субтитры: Французский

Часть программы вашего университета
EvaluationЧтение
Course discussionЧтение
Search the courseЧтение
Where to get helpЧтение

Introduction

Introduction and objectivesЧтениеIntro quizЗадание

Successful MEMS

Successful MEMS products: accelerometerВидеоPractice quiz successful MEMS products: accelerometerЗаданиеSuccessful MEMS products: microphoneВидеоPractice quiz successful MEMS products: microphoneЗаданиеSuccessful MEMS products: BAWВидеоPractice quiz successful MEMS products: BAWЗадание

Bimorph case study

Case study: thermo-mechanical micro-actuatorВидеоThermo-mechanical micro actuator: computation of the radius of curvatureЧтениеThermo-mechanical micro actuator: dynamic responseЧтениеPractice quiz case study: thermo-mechanical micro-actuatorЗадание

Cleanroom basics and CMi overview

Cleanroom basics: introducing the issue of contaminationВидеоPractice quiz cleanroom basics: introducing the issue of contaminationЗаданиеCleanroom basics: cleanroom strategyВидеоPractice quiz cleanroom basics: cleanroom strategyЗадание

Graded quiz

Graded quizЗадание

Conclusion and summary

Conclusion and summaryЧтениеYour feedbackPLUGIN
02Week 2: Chemical vapor deposition (CVD)18 материалов

Introduction

Introduction and objectivesЧтение

Overview of CVD techniques

Basic principles of CVD and CVD reactorsВидеоPractice quiz basic principles of CVD and CVD reactorsЗаданиеCVD techniques at different operating pressure, plasma-enhanced CVD and metal-organic CVDВидеоPractice quiz CVD techniques at different operating pressure, plasma-enhanced CVD and metal-organic CVDЗаданиеAtomic layer CVD (ALD) and thermal oxidation of siliconВидеоPractice quiz atomic layer CVD (ALD) and thermal oxidation of siliconЗадание

Theoretical aspects of CVD

Theoretical concepts of gas flow in CVD reactorsВидеоPractice quiz theoretical concepts of gas flow in CVD reactorsЗаданиеCVD thin film growth modelВидеоPractice quiz CVD thin film growth modelЗадание

Specific CVD processes

Specific CVD processes for silicon-based materials and diamondВидеоPractice quiz specific CVD processes for silicon-based materials and diamondЗаданиеThermal oxidation processes of silicon and ALD deposition of specific oxides and metalsВидеоPractice quiz thermal oxidation processes of silicon and ALD deposition of specific oxides and metalsЗадание

Graded quiz

Graded quizЗадание

Conclusion and summary

Conclusion and summaryЧтениеYour feedbackPLUGIN
03Week 3: Physical vapor deposition (PVD)32 материалов

Introduction

Introduction and objectivesЧтениеIntro quizЗадание

Thermal evaporation

Thermal evaporation: introduction and vapor creationВидеоThermal evaporation: materials and parametersЧтениеPractice quiz thermal evaporation: introduction and vapor creationЗаданиеThermal evaporation: film formation and examplesВидеоThermal evaporation in CMiВидеоPractice quiz thermal evaporation: film formation and examplesЗадание

Sputtering

Sputtering: introduction and plasma formationВидеоPractice quiz sputtering: introduction and plasma formationЗаданиеSputtering: spatial zones and Paschen lawВидеоSputtering: plasma detailed explanationЧтениеPractice quiz sputtering: spatial zones and Paschen lawЗаданиеSputtering: DC, RF, magnetronВидео

SUPPLEMENTARY Other PVD methods

SUPPLEMENTARY Other techniques: ion plating, MBE, PLD, …ВидеоSUPPLEMENTARY Practice quiz other techniques: ion plating, MBE, PLD, …Задание

Film growth

Film growth: atoms arrival and adhesionВидеоPractice quiz film growth: atoms arrival and adhesionЗаданиеFilm growth: stress in thin filmsВидеоPractice quiz film growth: stress in thin filmsЗаданиеSUPPLEMENTARY Film growth: growth modes and crystal structureВидеоSUPPLEMENTARY Practice quiz film growth: growth modes and crystal structureЗадание

Graded quiz

Graded quizЗадание

Conclusion and summary

Conclusion and summaryЧтениеYour feedbackPLUGIN
04Week 4: Lithography37 материалов

Introduction

Introduction and objectivesЧтениеIntro quizЗадание

General concepts of lithography

Introduction to lithographyВидеоPractice quiz introduction to lithographyЗаданиеResist properties and exposure methodsВидеоPractice quiz resist properties and exposure methodsЗаданиеSUPPLEMENTARY Photoresist sensitivity and modulation transfer functionВидео

UV lithography

UV lithography: direct writing and mask writingВидеоPractice quiz UV lithography: direct writing and mask writingЗаданиеUV lithography in CMi: mask fabricationВидеоPractice quiz UV lithography: mask fabricationЗаданиеUV lithography: mask based lithographyВидеоPractice quiz UV lithography: mask based lithographyЗадание

Electron beam lithography

Electron beam lithography: tool overviewВидеоPractice quiz electron beam lithography: tool overviewЗаданиеElectron beam lithography: electron optics and beam deflectionВидеоPractice quiz electron beam lithography: electron optics and beam deflectionЗаданиеSUPPLEMENTARY Electron beam lithography: tool overview IIВидеоSUPPLEMENTARY Practice quiz electron beam lighography: tool overview IIЗадание

Alternative patterning methods

Alternative patterning methods: scanning probe lithographyВидеоPractice quiz alternative patterning methods: scanning probe lithographyЗаданиеSUPPLEMENTARY Alternative patterning methods: replication methodsВидеоSUPPLEMENTARY Practice quiz alternative patterning methods: replication methodsЗадание

Graded quiz

Graded quizЗадание

Conclusion and summary

Conclusion and summaryЧтениеYour feedbackPLUGIN
05Week 5: Dry etching (DE)18 материалов

Introduction

Introduction and objectivesЧтение

Overview of dry etching techniques

Dry etching in a gas plasma; etching anisotropyВидеоPractice quiz dry etching in a gas plasma; etching anisotropyЗаданиеDeep dry etching of silicon; dry etching without a plasmaВидеоPractice quiz deep dry etching of silicon; dry etching without a plasmaЗадание

Theoretical concepts of dry etching

Theoretical concepts of plasma generationВидеоPractice quiz theoretical concepts of plasma generationЗадание

Dry etching experimental systems

Types of dry etching equipment and plasma sourcesВидеоPractice quiz types of dry etching equipment and plasma sourcesЗаданиеIon beam etchingВидеоPractice quiz ion beam etchingЗадание

Specific dry etching processes

Examples of etching processes for Si-based materialsВидеоPractice quiz examples of etching processes for Si-based materialsЗаданиеExamples of etching processes for organic films and metalsВидеоPractice quiz examples of etching processes for organic films and metalsЗадание

Graded quiz

Graded quizЗадание

Conclusion and summary

Conclusion and summaryЧтениеYour feedbackPLUGIN
06Week 6: Wet etching (WE)16 материалов

Introduction

Introduction and objectivesЧтениеAnisotropic and isotropic wet etching of Si and applicationsВидеоPractice quiz anisotropic and isotropic wet etching of Si and applicationsЗадание

Wet etching of oxides

HF bath for SiO2 and glass wet etchingВидеоPractice quiz HF bath for SiO2 and glass wet etchingЗадание

Isotropic and anisotropic wet etching of silicon

Isotropic wet etching of silicon in the HNA bathВидеоPractice quiz isotropic wet etching of silicon in the HNA bathЗаданиеAnisotropic wet etching of silicon in alkaline bathsВидеоPractice quiz anisotropic wet etching of silicon in alkaline bathsЗадание

Bulk and surface micromachining of silicon

Etch stop techniques for thin membrane microfabrication and bulk micromachiningВидеоPractice quiz etch stop techniques for thin membrane microfabrication and bulk micromachiningЗаданиеSupercritical drying for realization of suspended structures; test microstructures for quantifying stress in thin layersВидеоPractice quiz supercritical drying for realization of suspended structures; test microstructures for quantifying stress in thin layersЗадание

Graded quiz

Graded quizЗадание

Conclusion and summary

Conclusion and summaryЧтениеYour feedbackPLUGIN
07Week 7: Inspection and Metrology24 материалов

Introduction

Introduction and objectivesЧтениеIntro quizЗадание

Optical techniques

Optical microscopy: inspection and dimension measurementВидеоOptical microscopy: details in OM and DICЧтениеPractice quiz Optical microscopy: inspection and dimension measurementЗаданиеOptical thin film thickness measurementВидеоOptical thin film thickness measurementЧтениеThin film interference and ellipsometryЧтениеPractice quiz Optical thin film thickness measurementЗаданиеOptical surface profile measurementВидеоPractice quiz Optical surface profile measurementЗадание

Mechanical techniques

Mechanical surface profile measurementВидеоLinear variable differential transformerЧтениеPractice quiz Mechanical surface profile measurementЗадание

Charged beam techniques

Scanning electron microscopyВидеоPractice quiz Scanning electron microscopyЗаданиеFocused ion beam: local cross sectional inspection and measurementВидеоApplication of focused ion beam in failure analysisЧтениеPractice quiz Focused ion beam: local cross sectional inspection and measurementЗадание

Electrical techniques

Electrical characterizationВидеоPractice quiz Electrical characterizationЗадание

Graded quiz

Graded quizЗадание

Conclusion and summary

Conclusion and summaryЧтениеYour feedbackPLUGIN
08Goodbye note2 материалов

Farewell

Course evaluationЧтениеNew Plugin ItemPLUGIN
Practice quiz sputtering: DC, RF, magnetronЗадание
Sputtering: ion target interactionsВидео
Practice quiz sputtering: ion target interactionsЗадание
Sputtering: film growth and control parametersВидео
Practice quiz sputtering: film growth and control parametersЗадание
Sputtering: examplesВидео
Sputtering in CMiВидео
UV lithography in CMi: mask based lithographyВидео
Practice quiz UV lithography: overview photon based lithographyЗадание
SUPPLEMENTARY Electron beam lithography: design preparation and fractureВидео
SUPPLEMENTARY Practice quiz electron beam lithography: design preparation and fractureЗадание
Electron beam lithography: electron-sample interactionsВидео
Practice quiz electron beam lithography: electron-sample interactionsЗадание
Electron beam lithography: resistsВидео
ErrataЧтение
Practice quiz electron beam lithography: resistsЗадание
SUPPLEMENTARY Electron beam lithography: proximity effectВидео
SUPPLEMENTARY Practice quiz electron beam lithography: proximity effectЗадание