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Micro Electromechanical Systems · LearnSpace
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Micro Electromechanical Systems

Курс от Indian Institute of Science
Начальный≈ 27.3 чАнглийский
О курсеНавыкиПрограммаПреподаватели

О курсе

Unlock the potential of Micro Electromechanical Systems (MEMS) with this comprehensive course, designed to equip you with the knowledge and hands-on skills to excel in this transformative field. Dive deep into the essential concepts, materials, and fabrication techniques that power MEMS technology, and explore how it is revolutionizing industries. From understanding foundational MEMS principles to mastering advanced sensor fabrication and characterization methods, this course offers a step-by-step guide to becoming proficient in MEMS applications. Engage with dynamic video content and develop practical skills in cleanroom protocols, micromachining, and PCB design. Learn to fabricate MEMS sensors, interface them with advanced techniques, and apply communication protocols to create innovative solutions. Ideal for engineers, researchers, and students passionate about microfabrication and sensor design, this course will position you at the forefront of MEMS technology, ready to innovate and lead.

Навыки, которые вы освоите

Materials scienceLaboratory EquipmentLaboratory TestingElectronicsSemiconductorsCommunication SystemsElectronic Hardware3D ModelingHardware DesignManufacturing ProcessesAnalytical TestingBiomedical TechnologyProcess EngineeringMechanical Design

Программа курса

8 модулей · 67 учебных материалов

01Get Started!3 материалов
Introduction to Instructor and Course OutlineВидеоCourse Syllabus ЧтениеMeet and GreetОбсуждение
02Introduction to MEMS and Material Properties7 материалов

Introduction to MEMS and Material Properties

Учитесь у экспертов

Hardik Jeetendra Pandya

Associate Professor

Micro Electromechanical Systems
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Обучение на Coursera

≈ 27.3 ч

8 модулей

Язык: Английский

Субтитры: Казахский

Часть программы вашего университета
Meet the Team: Lab Facilities & Research HighlightsВидео
Overview of MEMS TechnologyВидео
Overview of MEMS: Concept of Micromachining Видео
Materials for MEMSВидео
Introduction to CleanroomВидео
Assignment 1 - MEMS BasicsЗадание
Module feedback and questionsОбсуждение
03MEMS Sensor Fabrication Techniques - Oxidation & Physical Vapour Deposition10 материалов

MEMS Sensor Fabrication Techniques - Oxidation & PVD​

Physical Vapour Deposition Technique: E-Beam EvaporationВидеоPhysical Vapour Deposition Technique: Thermal EvaporationВидеоPhysical Vapour Deposition Techniques: E-Beam Evaporation and Thermal EvaporationЧтениеThermal Oxidation NumericalsВидеоThermal Oxidation NumericalsЧтениеLab: E-Beam Evaporation Tool PreparationВидеоLab: E-Beam Evaporation DemonstrationВидеоLab: Thermal DepositionВидеоAssignment 2 - Thermal Oxidation & E-Beam TechniquesЗаданиеModule feedback and questionsОбсуждение
04MEMS Sensor Fabrication Techniques - Physical and Chemical Vapour Deposition Techniques7 материалов

MEMS Sensor Fabrication Techniques - PVD & CVD​

Physical Vapour Deposition Technique: SputteringВидеоChemical Vapour Deposition - Part 1ВидеоChemical Vapour Deposition - Part 2ВидеоLab: SputteringВидеоSputteringЧтениеAssignment 3 - Physical and Chemical Vapour Deposition TechniquesЗаданиеModule feedback and questionsОбсуждение
05MEMS Sensor Fabrication Techniques – Lithography9 материалов

MEMS Sensor Fabrication Techniques – Lithography

What is Photolithography?ВидеоBasics of Photolithography ВидеоPhotomask and Pattern TransferВидеоTypes of Photolithography ВидеоLithography NumericalsВидеоLab: PhotolithographyВидеоPhotolithography and Lithography NumericalsЧтениеAssignment 4 - LithographyЗаданиеModule feedback and questionsОбсуждение
06MEMS Sensor Fabrication Techniques – Micromachining11 материалов

MEMS Sensor Fabrication Techniques – Micromachining

Micromachining Based VOC SensorВидеоBulk MicromachiningВидеоSurface MicromachiningВидеоMicromachiningЧтениеDry EtchingВидеоDry EtchingЧтениеMiller IndicesВидеоMiller Indices & Wet EtchingЧтениеLab: Wet EtchingВидеоAssignment 5 - MicromachiningЗаданиеModule feedback and questionsОбсуждение
07Sensors & Interfacing Techniques​10 материалов

Senson Interfacinga & Communication

3D PrintingВидеоPCB Design - Introduction to Altium DesignerВидеоPCB Design - ContinuedВидеоRadar SensorsВидеоSensor Communication ProtocolsВидеоBasics of Sensor InterfacingВидеоSensor Interfacing Case StudyВидеоSensor Output EncodingВидеоAssignment 6 - Sensor Interfacing and 3D PrintingЗаданиеModule feedback and questionsОбсуждение
08Characterization & Applications of MEMS Sensors10 материалов

Characterization & Applications of MEMS Sensors

Introduction to Material Characterization - IR SpectroscopyВидеоMaterial Characterization - UV-Visible SpectroscopyВидеоMaterial Characterization - X-ray Diffraction and X-ray FluorescenceВидеоCharacterisationЧтениеMEMS Based SensorВидеоApplications of MEMSВидеоLab: Wire BondingВидеоAssignment 7 - Material CharacterizationЗаданиеFinal ExamЗаданиеModule feedback and questionsОбсуждение