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Cleanroom Fundamentals & Semiconductor Technologies · LearnSpace
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Cleanroom Fundamentals & Semiconductor Technologies

Курс от University at Buffalo, The State University of New York
Начальный≈ 9.4 чАнглийский
О курсеНавыкиПрограммаПреподаватели

О курсе

This entry-level online course offers a brief overview of silicon-based semiconductor fabrication, geared toward engineering undergraduates, graduate students, and pre-college learners exploring career paths in the semiconductor field. No prior experience is required. Students receive an introduction to cleanroom facilities and the environment in which microfabrication takes place. They will then apply their knowledge in a hands-on virtual lab that walks you through University at Buffalo's Davis Hall Cleanroom (among the most advanced in the region) that demonstrates the core processes of Photolithography and Etching.

Навыки, которые вы освоите

SemiconductorsCritical ThinkingLaboratory ProceduresElectronic ComponentsHigher EducationChemical EngineeringElectronicsProblem SolvingMechanical EngineeringEngineeringEmerging TechnologiesElectrical EngineeringManufacturing ProcessesMaterials scienceTime ManagementGoal SettingSelf-Starter

Программа курса

4 модулей · 51 учебных материалов

01Welcome to Cleanroom Fundamentals & Semiconductor Technologies!6 материалов

Introduction

Introduction VideoВидеоWelcome Message & Course OverviewЧтениеCourse Syllabus (Downloadable PDF)ЧтениеAcknowledgementsЧтение

Cleanroom Tours - Explore UB & SUNY Erie Cleanroom Facilities

Учитесь у экспертов

Jeff Salzmann

Преподаватель курса

Cleanroom Fundamentals & Semiconductor Technologies
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Обучение на Coursera

≈ 9.4 ч

4 модулей

Язык: Английский

Часть программы вашего университета
University at Buffalo - Cleanroom Tour Видео
SUNY Erie Community College - Cleanroom TourВидео
02Lecture Part 116 материалов

1. TRANSISTORS | Understand How Transistors Behave as a Switch

Transistors SlidesЧтениеTransistors Video LectureВидеоElectronicsHub - Additional ResourceЧтение

2. CLEANROOMS | Learn the Fundamental Principles of Cleanroom Design and Operation, with a Focus on Filtration, Airflow Patterns, and Pressurization Control

Cleanrooms SlidesЧтениеCleanrooms ВидеоCleanroom: A Comprehensive Guide - Additional ResourceЧтение

3. SEMICONDUCTOR MATERIALS | Gain Insights on the Production Processes of Ultrapure Silicon and the Additional Materials Used in Transistor Fabrication

Semiconductor Materials SlidesЧтениеSemiconductor MaterialsВидеоSemiconductor Fabrication - Additional ResourcesЧтение

4. VACUUM SCIENCE OVERVIEW | Learn the Purpose and Functioning of Vacuum Systems in Semiconductor Fabrication Processes

Vacuum Science Overview SlidesЧтениеVacuum Science OverviewВидеоLeybold Fundamentals - Additional ResourceЧтение

5. PHYSICAL VAPOR DEPOSITION (PVD) | Explore the Basic Principles Behind Evaporation and Sputter PVD processes, as well as the Function of Vacuum Process Control Systems

Physical Vapor Deposition (PVD) SlidesЧтениеPhysical Vapor Deposition (PVD)ВидеоWhat is Physical Vapor Deposition (PVD)? - Additional ResourceЧтение

Lecture Part 1 Discussion Prompts (Optional)

Discussion PromptsОбсуждение
03Lecture Part 219 материалов

1. CHEMICAL VAPOR DEPOSITION (CVD) | Familiarize Yourself with the Basics of CVD Processes, Including the Chemistry Involved and the Essential Equipment Used

Chemical Vapor Deposition (CVD) SlidesЧтениеChemical Vapor Deposition (CVD)ВидеоMIT News & Lam Research - Additional ResourcesЧтение

2. DOPING | Learn What Doping Is and How It Is Accomplished

Doping SlidesЧтениеDopingВидеоThe Role of Doping & Ion Implantation - Additional ResourceЧтение

3. OXIDATION | Learn the Core Concepts of Thermal Oxidation of Silicon and Contact Sintering

Oxidation SlidesЧтениеOxidationВидеоThermal Oxidation - Additional ResourceЧтение

4. WET PROCESSING | Grasp the Key Principles of Liquid-based Chemical Cleaning and Etching Techniques

Wet Processing SlidesЧтениеWet ProcessingВидеоEtching for Wet Processing & RCA Critical Cleaning Process - Additional ResourceЧтение

5. DRY ETCHING | Discover how Plasmas Work and Their Role in Etching Materials

Dry Etching SlidesЧтениеDry EtchingВидеоUnderstanding Plasma Etching - Additional ResourceЧтение

6. PHOTOLITHOGRAPHY | Understand the Processes and Techniques for Creating Patterns on Semiconductor Materials

Photolithography SlidesЧтениеPhotolithographyВидеоSemiconductor Lithography - Additional ResourceЧтение

Lecture Part 2 Discussion Prompt (Optional)

Discussion PromptsОбсуждение
04Virtual Hands-on Lab10 материалов

Photolithography Bay (Yellow Light)

Photolithography Bay - What it is & Why Yellow Light?ЧтениеVapor-Priming WaferВидеоSpin-Coat PhotoresistВидеоExpose Image ВидеоDevelop ImageВидео

Etch Bay (White Light)

Etch Bay Description - What it is & Why White Light?ЧтениеEtched Patterned WaferВидеоRemove PhotoresistВидео

Course Conclusion Questions

Course Reflection & Future PerspectiveЗаданиеOptional Discussion Prompt: Course Reflection & Future Perspective Обсуждение